MEMS and nanotechnology for gas sensors 

MEMS and nanotechnology for gas sensors pdf

Table of contents :

section 1. Fabrication procedure. Introduction —
Substrate for MEMS —
Deposition —
Photolithography: Pattern Transfer —
Structuring MEMS:: Micromachining —
Microheaters for Gas Sensor —
section 2. Sensor applications. Semiconductors as Gas Sensors —
Sensing with Graphene —
Nanocrystalline ZnO-Based Microfabricated Chemical Sensor —
Nanostructures for Volatile Organic Compound Detection —
Sensor Interfaces —
MEMS- and Nanotechnology-Enabled Sensor Applications.

MEMS and nanotechnology for gas sensors PDF

Author(s): Roy, Sunipa; Sarkar, Chandan Kumar

Publisher: CRC Press, Year: 2016

ISBN: 978-1-4987-0013-9,1498700136



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