| Book Name: | MEMS and nanotechnology for gas sensors |
| Category: | Automation Books |
| Free Download: | Available |
MEMS and nanotechnology for gas sensors
Table of contents :
section 1. Fabrication procedure. Introduction —
Substrate for MEMS —
Deposition —
Photolithography: Pattern Transfer —
Structuring MEMS:: Micromachining —
Microheaters for Gas Sensor —
section 2. Sensor applications. Semiconductors as Gas Sensors —
Sensing with Graphene —
Nanocrystalline ZnO-Based Microfabricated Chemical Sensor —
Nanostructures for Volatile Organic Compound Detection —
Sensor Interfaces —
MEMS- and Nanotechnology-Enabled Sensor Applications.
MEMS and nanotechnology for gas sensors PDF
Author(s): Roy, Sunipa; Sarkar, Chandan Kumar
Publisher: CRC Press, Year: 2016
ISBN: 978-1-4987-0013-9,1498700136
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